Modifying surfaces by shooting particles at them - this technique, called 'sputtering', is indispensable in surface science. However, if the surface is not perfectly smooth and regular, it is hard to ...
High power magnetron sputtering techniques have become essential tools in the deposition of advanced thin films. By utilising high power pulses, these methods generate highly ionised plasmas that ...
BERKELEY, CA – In the electronics industry, thin metal films are deposited on silicon wafers with a sputter gun, which uses energetic ions – atoms with a positive charge – to knock the metal atoms off ...
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